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  4. A large deflection translatory actuator for optical path length modulation
 
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2006
  • Konferenzbeitrag

Titel

A large deflection translatory actuator for optical path length modulation

Author(s)
Drabe, C.
Klose, T.
Schenk, H.
Wolter, A.
Lakner, H.K.
Hauptwerk
MEMS, MOEMS, and Micromachining II
Konferenz
Conference "MEMS, MOEMS, and Micromachining" 2006
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DOI
10.1117/12.662853
Language
Englisch
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