Hall sensors have been established long ago. Single sensor elements can be purchased from many different suppliers. For array sensors interesting applications like position and rotation detection arise. Arrays setup from single sensors in surface mounted or chip on board technology serve some tasks. Smaller size and higher position accuracy can only be realized by integrated arrays. First chips have been developed some years ago to a level that demonstrates the principal function. Now, new chips have been designed in silicon on insulator (SOI) technology that provides high sensitivity, low noise and a wide temperature range. The chip is 7.8 mm wide and has 32 sensor elements with 250 ?m pitch. Random access or successive switching of the sensors is realized as well as selectable sensitivity of the sensors. The analogue output is adjusted to 0-5 V suitable for the requirements of most analog to digital converters (ADCs). Applications like highly accurate linear or rotational position detection can be realized.
