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Micro-actuator with extended analog deflection at low drive voltage
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2006
Konferenzbeitrag
Titel
Micro-actuator with extended analog deflection at low drive voltage
Author(s)
Dürr, P.
Gehner, A.
Schmidt, J.
Kunze, D.
Wagner, M.
Lakner, H.
Hauptwerk
MOEMS display, imaging, and miniaturized microsystems IV
Konferenz
Conference "MOEMS, Display, Imaging, and Miniaturized Microsystems" 2006
Language
Englisch
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IPMS
Tags
SLM
pull-in
analog
extended range
electrostatic
