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Temperature stability of the frequency of a resonant micro scanning mirror
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2003
Konferenzbeitrag
Titel
Temperature stability of the frequency of a resonant micro scanning mirror
Author(s)
Wolter, A.
Koorth, H.
Schenk, H.
Lakner, H.
Hauptwerk
IEEE/LEOS International Conference on Optical MEMS 2003
Konferenz
International Conference on Optical MEMS 2003
Language
Englisch
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