The moving liquid mirror (MLM) spatial light modulator
Titel Supplements
Simulation and measurement of the optical performance
Abstract
Spatial light modulators (SLM) are electro-optical devices employed as optical pattern generators in applications like projection displays, direct-writing systems for photolithographic patterning, adaptive optics or optical signal processing. Here we report on the "moving liquid mirror" (MLM) as a new micromechanical actuator technology based on a deformable oil film on an aluminum mirror with electrode structure. The actuator is suitable for integration on a silicon backplane as CMOS-addressing circuit. Thus production in standard CMOS-technology is possible. A theoretical analysis of the device behavior is given, and the results of simulations are presented. Measurements on passive devices show good agreement with the simulations. Finally, active MLM-devices have been fabricated. Images can be programmed into the devices and observed under a microscope (figure 1).
