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Konferenzschrift
Ex situ and in situ spectroscopic ellipsometry of MF and DC-sputtered TiO2 and SiO2 films for process control
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1999
Konferenzbeitrag
Titel
Ex situ and in situ spectroscopic ellipsometry of MF and DC-sputtered TiO2 and SiO2 films for process control
Author(s)
Vergöhl, M.
Malkomes, N.
Staedler, T.
Matthee, T.
Richter, U.
Hauptwerk
High-performance coatings for transparent systems in large-area and/or high-volume applications. 2nd International Conference on Coatings on Glass, ICCG
Konferenz
International Conference on Coatings on Glass (ICCG) 1998
Language
Englisch
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