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Precision embossing of grooves in metallic substrates for self-aligned positioning of microoptical components
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1998
Konferenzbeitrag
Titel
Precision embossing of grooves in metallic substrates for self-aligned positioning of microoptical components
Author(s)
Hillerich, B.
Rode, M.
Hauptwerk
Micro System Technologies '98
Konferenz
International Conference on Micro-, Electro-, Opto-, Mechanical Systems and Components 1998
Language
Englisch
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