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Laseroptical deformation measurements on SAA-materials
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1997
Conference Paper
Titel
Laseroptical deformation measurements on SAA-materials
Author(s)
Faust, W.
Bombach, C.
Oehmigen, M.
Großer, V.
Michel, B.
Hauptwerk
Micro Materials. Micro Mat '97. Proceedings
Konferenz
Micro Materials (Micro Mat) 1997
Language
English
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Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM
