Results of the development of sensors and myTAS-modules
Sensors in different silicon technologies and microfluid devices have been developed. They are designed to be integrated in a modular myTAS. All process steps including the biocomponent and electrolyte deposition are fully mass-production compatible. To demonstrate their performance two types of a hybrod micri FIA have been realized. The first one is used for the detection of a herbicide and the second one for inorganic phosphate. Du to the modular concept it is easy to adapt the system to the actual analyte to be measured. Furthermore, the results of two Clark-type oxygen sensors are given.