MEMS component with in-plane movable element and method for operating same
What is proposed is a MEMS component comprising a layer stack comprising at least one second layer formed between a first layer and a third layer. At least one first cavity is formed in the second layer. The MEMS component furthermore comprises a laterally deflectable element having an end connected to a sidewall of the first cavity, and having a free end. Furthermore, the MEMS component comprises a passive element, which is rigidly linked to the free end of the laterally deflectable element, in order to follow a movement of the laterally deflectable element. The laterally deflectable element and the passive element subdivide the first cavity into a first partial cavity and a second partial cavity. The first partial cavity is in contact with an ambient fluid around the MEMS component via at least one first opening. Furthermore, the second partial cavity is in contact with the ambient fluid around the MEMS component via at least one second opening. The at least one first opening is formed in a different layer, chosen from the first layer and the third layer, by comparison with the at least one second opening.
WO 2021093950 A1: 20191113