Verfahren zur hochempfindlichen Streulichtmessung

The method involves illuminating a sample (1) with a measuring light beam (2) in a plane of incidence (6) at an incidence angle (theta-i), where scattered light (4) of the sample is measured in a detection direction. The detection direction is determined by a polar scatter angle (theta-s) measured for normal (n) of a sample surface (5) and an azimuthal scatter angle (phi-s) measured inwards plane of incidence in a plane of the sample surface. The scatter light measurement is performed in detection direction such that polar scatter angle of detection direction is held in specific angle range.