Verfahren zur hochempfindlichen Streulichtmessung
The method involves illuminating a sample (1) with a measuring light beam (2) in a plane of incidence (6) at an incidence angle (theta-i), where scattered light (4) of the sample is measured in a detection direction. The detection direction is determined by a polar scatter angle (theta-s) measured for normal (n) of a sample surface (5) and an azimuthal scatter angle (phi-s) measured inwards plane of incidence in a plane of the sample surface. The scatter light measurement is performed in detection direction such that polar scatter angle of detection direction is held in specific angle range.
DE 102012106322 B3: 20120713