Einrichtung zur Durchfuehrung elektronenstrahltechnologischer Prozesse im Vakuum
Known facilities are basically not universally applicable since the size of the workpieces to be treated is dependent on the dimensions of the recipients, i.e. their volume. This means that with small workpieces, a considerably large volume is evacuated. The problem therefore exists of creating a device adaptable to the workpiece size. According to the invention, the device consists of a middle section acting as the recipient said middle section containing all the modules required for the process in addition to the electron gun. Segments are flanged vacuum-tight to the middle section. On both sides, there is an end piece arranged in the same way, whereby one is formed as a door. Each part of the recipient contains a guide track to transport the workpiece carrier through the device. Said guide tracks join up to form a continuous guide track when mounted side by side. The device can be preferably used for the surface modification of mechanical engineering components and for the hardening of guide tracks and surfaces on machine parts.
DE 1994-4418161 A: 19940525