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  4. Investigation of High Electric Field Degradation Effects on Nanoscopic Electrostatic Drive Actuators (NED)
 
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2021
Master Thesis
Titel

Investigation of High Electric Field Degradation Effects on Nanoscopic Electrostatic Drive Actuators (NED)

ThesisNote
Chemnitz, TU, Master Thesis, 2021
Author(s)
Mahanta, Trideep
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Advisor
Ruffert, Christine
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Stolz, Michael
Beteiligt
Wunderle, Bernhard
Verlagsort
Chemnitz
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Language
Englisch
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