• English
  • Deutsch
  • Log In
    or
  • Research Outputs
  • Projects
  • Researchers
  • Institutes
  • Statistics
Repository logo
Fraunhofer-Gesellschaft
  1. Home
  2. Fraunhofer-Gesellschaft
  3. Artikel
  4. Enhancement of Ohmic heating by Hall current in magnetized capacitively coupled discharges
 
  • Details
  • Full
Options
2019
  • Zeitschriftenaufsatz

Titel

Enhancement of Ohmic heating by Hall current in magnetized capacitively coupled discharges

Abstract
In low-pressure capacitively coupled discharges, a heating mode transition from a pressure-heating dominated state to an Ohmic-heating dominated state is known by applying a small transverse magnetic field. Here we demonstrate via particle-in-cell simulations and a moment analysis of the Boltzmann equation that the enhancement of Ohmic heating is induced by the Hall current in the ${\boldsymbol{E}}\times {\boldsymbol{B}}$ direction. As the magnetic field increases, the Ohmic heating in the ${\boldsymbol{E}}\times {\boldsymbol{B}}$ direction dominates the total electron power absorption. The Ohmic heating induced by the Hall current can be well approximated from the Ohmic heating of unmagnetized capacitively coupled discharges.
Author(s)
Zheng, B.C.
Wang, K.
Grotjohn, T.
Schuelke, T.
Fan, Q.H.
Zeitschrift
Plasma sources science & technology
Thumbnail Image
DOI
10.1088/1361-6595/ab419d
Language
Englisch
google-scholar
CCD
  • Cookie settings
  • Imprint
  • Privacy policy
  • Api
  • Send Feedback
© 2022