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  4. Large area deposition of superhard carbon films
 
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2005
  • Zeitschriftenaufsatz

Titel

Large area deposition of superhard carbon films

Abstract
During the 1990s, the Laser-Arc technology for the deposition of superhard amorphous carbon films (DiamorĀ®) was developed at the Fraunhofer Institute for Material and Beam Technology. This technology has now been scaled up by a factor of 4 compared to existing devices and integrated in an industrial large-volume vacuum arc coater. Initial results demonstrate the possibility of depositing well adherent DiamorĀ® films with a thickness of more than 2 microns and a hardness above 4000 HV on larger parts and tools. This opens up a wide field of industrial applications.
Author(s)
Stucky, T.
Baier, U.
Meyer, C.-F.
Scheibe, H.-J.
Schultrich, B.
Zeitschrift
Vakuum in Forschung und Praxis
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DOI
10.1002/vipr.200590025
Language
Englisch
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