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Laser micromachining for applications in thin film technology
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2000
Zeitschriftenaufsatz
Titel
Laser micromachining for applications in thin film technology
Author(s)
Pfleging, W.
Ludwig, A.
Seemann, K.
Preu, R.
Mäckel, H.
Glunz, S.W.
Zeitschrift
Applied surface science
DOI
10.1016/S0169-4332(99)00468-7
Language
Englisch
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