1999
Titel

Properties of sputtered and sol-gel deposited PZT thin films for sensor and actuator applications
Titel Supplements
Preparation, stress and space charge distribution, self poling
Author(s)
Gerlach, G.
Suchaneck, G.
Köhler, R.
Sandner, T.
Padmini, P.
Krawietz, R.
Pompe, W.
Frey, J.
Jost, O.
Schönecker, A.
Zeitschrift
Thumbnail Image
DOI
Language
Englisch