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  4. Formation of cobalt silicide by ion beam mixing
 
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1991
  • Zeitschriftenaufsatz

Titel

Formation of cobalt silicide by ion beam mixing

Author(s)
Burte, E.P.
Min, Y.
Ryssel, H.
Zeitschrift
Nuclear instruments and methods in physics research, Section B. Beam interactions with materials and atoms
Konferenz
International Conference on Ion Beam Modification of Materials 1990
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Language
Englisch
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