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Cobalt disilicide formed by rapid thermal annealing and through-metal arsenic implantation
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1991
Zeitschriftenaufsatz
Titel
Cobalt disilicide formed by rapid thermal annealing and through-metal arsenic implantation
Author(s)
Burte, E.P.
Min, Y.
Zeitschrift
Journal of Materials Research
DOI
10.1557/JMR.1991.1892
Language
Englisch
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