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Complete thin film system for hybrid circuits sputtered with the plasmatron
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1981
Journal Article
Titel
Complete thin film system for hybrid circuits sputtered with the plasmatron
Author(s)
Schiller, S.
Heisig, U.
Goedicke, K.
Bilz, H.
Pfeil, G.
Henneberger, J.
Vogler, G.
Zeitschrift
Thin solid films
DOI
10.1016/0040-6090(81)90662-3
Language
English
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Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP
