1979
Journal Article
Titel

Advances in high rate sputtering with magnetron-plasmatron processing and instrumentation
Author(s)
Schiller, S.
Heisig, U.
Goedicke, K.
Steinfelder, K.
Schade, K.
Teschner, G.
Henneberger, J.
Zeitschrift
Thumbnail Image
DOI
Language
English