Single crystal silicon micro mirrors

A single crystal silicon mirror technology based on BSOI (Bonded Silicon on Insulator) wafers is presented to fabricate 1D and 2D scanning mirrors. An in-plane electrode configuration is used to resonantly drive the mirror. The optical, mechanical and sensorial requirements are discussed in particular for projection applications. The Image quality of dynamically deformed mirrors is treated by the modulation transfer function. A design approach for the mirror suspension is presented to achieve a lower degree of dynamic deformation and thus to minimize image quality degradation. The fracture probability of torsional springs is treated by a Weibull statistic. A separation approach is used to compare springs of various shape and load. For amplitude and phase control a novel integrated piezoresistive transducer is presented which can be fabricated without any additional implantations. The potential of the single crystal silicon micro mirrors is demonstrated by an ultra compact VGA projector and a micro laser camera for endoscopes.