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Comparison of layer properties deposited with unipolar and bipolar pulsed magnetron sputtering
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2002
Conference Paper
Title
Comparison of layer properties deposited with unipolar and bipolar pulsed magnetron sputtering
Author(s)
Krause, U.
Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP
Peters, C.
Rettich, T.
Wiedemuth, P.
Mainwork
4th International Conference on Coatings on Glass 2002. Proceedings
Conference
International Conference on Coatings on Glass (ICCG) 2002
Language
English
Fraunhofer-Institut für Elektronenstrahl- und Plasmatechnik FEP
