A modular fluidic demonstrator for the Match-X framework

With this paper, we are presenting a modular fluidic microsystem using MoMEMS (Modularly Micro Electronic Mechanical Systems). This microsystem, or fluidic demonstrator has been developed for the pneumatic industry to show the powerful capabilities of MoMEMS as part of the Match-X framework, employed with a fluidic/electrical interface. There are two stacks, one electronic and one fluidic. The electronic stack consists of a microprocessor module and a memory module. The fluidic stack is composed of a module coupling compressed air into the air flow bus, three distribution modules to distributing air to the right parts of the air flow bus, three valve modules controlling the air flow between the inlet duct, the switch port and the outlet port, and, finally, a pump membrane chamber pumping materials such as oil or water.