Active 600 GHz frequency multiplier-by-Six S-MMICs for submillimeter-wave generation

For submillimeter-wave frequency generation we present active six-fold frequency multiplier monolithic integrated circuits. Without post-amplifier stage, an output power of -15 dBm in the frequency range from 507 to 672GHz is reached. A second S-MMIC with an integrated output buffer amplifier achieves a maximum output power of -8 dBm at 557 GHz and a 3-dB output frequency range from 552 to 618 GHz. A frequency selective measurement in the WR-1.5 band proves spurious suppression of unwanted harmonics. Both S-MMICs are realized in a 35 nm metamorphic HEMT technology for multifunctional circuit integration.