Publication:
Sheet Resistance Imaging on Ag Thin Films with THz-TDS in Reflection Geometry

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cris.virtual.departmentFraunhofer-Institut für Nachrichtentechnik, Heinrich-Hertz-Institut HHI
cris.virtual.departmentFraunhofer-Institut für Lasertechnik ILT
cris.virtual.departmentFraunhofer-Institut für Lasertechnik ILT
cris.virtual.departmentFraunhofer-Institut für Nachrichtentechnik, Heinrich-Hertz-Institut HHI
cris.virtual.departmentFraunhofer-Institut für Nachrichtentechnik, Heinrich-Hertz-Institut HHI
cris.virtual.departmentFraunhofer-Institut für Nachrichtentechnik, Heinrich-Hertz-Institut HHI
cris.virtual.departmentFraunhofer-Institut für Lasertechnik ILT
cris.virtual.departmentFraunhofer-Institut für Lasertechnik ILT
cris.virtual.departmentFraunhofer-Institut für Nachrichtentechnik, Heinrich-Hertz-Institut HHI
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crisou.acronymILT
crisou.acronymHHI
dc.contributor.authorWenzel, Konstantin
dc.contributor.authorMertin, Jonas
dc.contributor.authorVedder, Christian
dc.contributor.authorKlein, Sarah
dc.contributor.authorTraub, Martin
dc.contributor.authorKohlhaas, Robert
dc.contributor.authorSchell, Martin
dc.contributor.authorGlobisch, Björn
dc.contributor.authorLiebermeister, Lars
dc.date.accessioned2023-07-13T08:15:49Z
dc.date.accessioned2025-06-11T10:45:34Z
dc.date.available2023-07-13T08:15:49Z
dc.date.issued2022
dc.description.abstractWe present sheet resistance imaging of silver (Ag) thin films on a ~50μm-thick dielectric layer on a plane steel substrate. THz imaging avoids damaging these films through contacting and allows for a high spatial resolution. We use a commercial THz time-domain spectroscopy system in reflection geometry. Our measurement data are interpreted by a least squares fit to a simple model of the frequency response of the layer stack based on Fresnel equations and the Drude model. The analysis reveals the thickness of the dielectric and the Ag-layer as well as the dielectric function of the Ag-layer. By raster-scanning the sample, spatially-resolved sheet resistance maps are non-destructively generated.
dc.description.endpage930
dc.description.startpage929
dc.identifier.doi10.1109/IRMMW-THz50927.2022.9895484
dc.identifier.scopus2-s2.0-85139846630
dc.identifier.urihttps://publica.fraunhofer.de/handle/publica/445569
dc.language.isoen
dc.relation.conferenceInternational Conference on Infrared, Millimeter and Terahertz Waves 2022
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dc.relation.publication47th International Conference on Infrared, Millimeter and Terahertz Waves, IRMMW-THz 2022
dc.subjectResistance
dc.subjectDielectrics
dc.subjectTerahertz wave imaging
dc.titleSheet Resistance Imaging on Ag Thin Films with THz-TDS in Reflection Geometry
dc.typeconference paper
dspace.entity.typePublication
oairecerif.acronymIRMMW-THz
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publica.fhg.departmentOberflächentechnik und Formabtrag
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publica.fhg.instituteFraunhofer-Institut für Nachrichtentechnik, Heinrich-Hertz-Institut HHI
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publica.rights.timestamp2025-06-30 22:43:00.546489

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