Effect of fabrication errors on multilevel Fresnel zone lenses

Blazed Fresnel zone lenses for the 1.5 mu m wavelength were fabricated in quartz glass by means of microstructuring technology. The blazed profile in each zone of the lenses was approximated by two, four, and eight discrete levels. The effects of fabrication errors, such as depth and alignment errors, on the diffraction efficiency of the different Fresnel zone lenses were investigated. Further the location and intensity of the parasitic foci appearing due to the discrete level approximation are calculated. Theoretical results along with experimental measurements are presented.