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Properties of transparent conductive niobium doped titania (TNO) thin film deposited by large area DC and pulsed DC sputtering
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2010
Conference Paper
Title
Properties of transparent conductive niobium doped titania (TNO) thin film deposited by large area DC and pulsed DC sputtering
Author(s)
Junghähnel, M.
Heimke, B.
Hartung, U.
Kopte, T.
Zywitzki, O.
Mainwork
8th International Conference on Coatings on Glass and Plastics, ICCG 2010. Advanced Coatings for Large Area or High-Volume Products. Proceedings
Conference
International Conference on Coatings on Glass and Plastics (ICCG) 2010
Language
English
Fraunhofer-Institut für Elektronenstrahl- und Plasmatechnik FEP
Keyword(s)
transparent conductive oxide
titanium dioxide
niobium doped titania
sputtering
