2024
Conference Paper
Title

Structured Illumination EUV Imaging

Abstract
We present table-top EUV imaging at 13.5 nm. Using an EUV phase diffusor for generating a highly structured illumination, improves the image quality and resolution in ptychography and opens new avenues for single-shot EUV imaging.
Author(s)
Licht, Leona
Helmholtz Institute Jena
Eschen, Wilhelm
Helmholtz Institute Jena
Liu, Cheng
Helmholtz Institute Jena
Penagos Molina, Daniel S.
Helmholtz Institute Jena
Steinert, Michael
Friedrich-Schiller-Universität Jena
Siefke, Thomas
Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF  
Pertsch, Thomas  
Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF  
Limpert, Jens  
Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF  
Rothhardt, Jan  
Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF  
Mainwork
Conference
DOI
Language
English