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May 22, 2023
Presentation
Title
Ionic film deposition from single-filament dielectric-barrier discharges - Comparison of hexamethyldisiloxane and hexamethyldisilane precursors
Title Supplement
Paper for ISPC 2023
Abstract
Single-filament dielectric-barrier discharges at atmospheric pressure are used to investigate the effect of short residence times on the plasma polymerization of
hexamethyldisiloxane (HMDSO) and hexamethyldisilane (HMDS), respectively. Experiments with precursor fractions between 25 and 2000 ppm in argon show that neither radicals are deposited nor surface reactions with the monomer take place. Possible pathways for the ionic deposition using HMDSO or HMDS are discussed.
hexamethyldisiloxane (HMDSO) and hexamethyldisilane (HMDS), respectively. Experiments with precursor fractions between 25 and 2000 ppm in argon show that neither radicals are deposited nor surface reactions with the monomer take place. Possible pathways for the ionic deposition using HMDSO or HMDS are discussed.
Author(s)
Winzer, Tristan
Christian-Albrechts-Universität zu Kiel, Mathematisch-Naturwissenschaftliche Fakultät