Modern coating and annealing technologies for advanced multifunctional layer stacks

In the last years, the demands for the quality of layers and layer stacks were steadily increasing. In order to optimize the coating processes, the process control needs to be increasingly precise. Consequently, optimized feedback loops, target developments and process control improvements are important factors for the development of innovative thin film products. On the other hand economic factors of e.g. material choice, the efficiency of material utilization and the energy efficiency of the processes are the basis for a cost-efficient high-volume production. As examples MagPECVD processes for the efficient deposition of low stress silica films, Flash lamp annealing (FLA) as an economic post treatment technology and multilayer filters sputtered with high precision requirements will be discussed.