Patent
Title

Mikroventil mit vorgespannter Ventilklappenstruktur

Other Title
Electrostatically-operated silicon microvalve e.g. fluidic flow valve, such as gas valve - has valve flap mechanically biased into open position and closed by operating voltage applied across valve flap and valve base structure incorporating flow opening.
Abstract
The microvalve (10) has a flow opening formed in a base structure (12), controlled by a mechanically tensioned valve flap (11), which is raised from the flow opening in its normal condition. The side of the valve flap facing the flow opening and the fixing point between the valve flap and the base structure have an insulating coating (17), for electrically insulating the valve flap from the base structure, so that an operating voltage can be applied between them. USE - Bistable microvalve e.g. for fluids, including gas. ADVANTAGE - Requires relatively small operating voltage for closure of valve.
Inventor(s)
Richter, M.
Link to Espacenet
Patent Number
1996-19637878
Publication Date
2002
Language
German