Vorrichtung und Verfahren zur Interferenzstrukturierung von flächigen Proben

The device has lens assembly (2) that is provided to focus laser beam (L) into a sample volume (3) along a spatial direction (y), so as to image sample area (P). The lens assembly and isolating arrangement (4) are set in beam path of laser beam, while maintaining focused image in sample volume along the spatial direction. The laser beam are separated into partial beams which are not parallel are expanded along orthogonal direction (X). The partial beams (L1, L2) directed within sample volume are interfered in an interference area (5). An independent claim is included for a method for interference structuring of planar sample.