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Vorrichtung zur grossflaechigen Plasmaerzeugung
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Patent
Title
Vorrichtung zur grossflaechigen Plasmaerzeugung
Inventor(s)
Heinrich, F.
Baenziger, U.
Link to:
Espacenet
Patent Number
1995-19548657
Publication Date
2003
Language
German
Fraunhofer-Institut für Siliziumtechnologie ISIT