Now showing 1 - 4 of 4
  • Publication
    Grazing-incidence interference microscopy for the measurement of topography of fine-machined surfaces
    ( 1993)
    Spur, G.
    ;
    Körner, K.
    ;
    Nyarsik, L.
    ;
    Fritz, H.
    ;
    Uhlmann, E.
    A possibility for measuring the form, waviness and roughness of fine-machined surfaces by interferometric means is discussed. A variety of fine-machined surfaces shows parameters in the range of microns. So it is necessary to increase the interferometric increment in a two-beam-interferometer with visible light by grazing incidence illumination. This principle was investigated in a new prism interferometer and in a new grazing incidence microscope. Test measurements are represented and discussed.
  • Publication
    Imaging characteristics of prism interferometers
    ( 1993)
    Spur, G.
    ;
    Nyarsik, L.
    ;
    Körner, K.
    The micro topography of technical surfaces was measured with a prism interferometer. A new anamorphic double-module serving as an interference head was designed for this purose. This interference head provides a shear-free-two-beam interference image and allows computer-controlled phase-shifting for phase-sampling methods. The distance between the specimen's surface and the module may exceed 1 mm. A mathematical-physical model for prism interferometers was worked out to properly evaluate the information on the surface which has had been gained by means of interferometric images.
  • Publication
    Evaluation of interference patterns in a prism interferometer
    ( 1993)
    Spur, G.
    ;
    Nyarsik, L.
    ;
    Körner, K.
    ;
    Fritz, H.
    Prism interferometers allow a ten times enlargement of the interference increment by means of grazing incidence of the objects's surface. Experiments were performed attempting to use a prism interferometer for measuring both the macro profile and the micro structure of technical surfaces. Because anamorphic elements are used in the prism interferometer, it was necessary to carry out a theoretical analysis of the system's imaging characteristics. An experimental method was suggested and experiments with a prototype system were performed.
  • Publication
    Interferometric measurement of fine-machined surfaces
    ( 1992)
    Spur, G.
    ;
    Nyarsik, L.
    ;
    Körner, K.
    ;
    Krahn, A.
    A possibility for measuring the form, waviness and roughness of fine-machined surfaces by interferometric means is discussed. A variety of fine-machined surfaces shows parameters of hight in the range of microns. So it is necessary to increase the interfermometric increment in a two-beam-interferometer with visible light by grazing incidence illumination. This principle was investigated in a new prism interferometer. A test method for the interferometer is proposed and measurements are represented.