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Patent

Vorrichtung und Verfahren zur Pruefung der Gestalt einer Oberflaeche eines zu vermessenden Objektes

1998 , Koerner, K. , Fritz, H. , Nyarsik, L. , Spur, G. , Uhlmann, E.

The description relates to a device for the topographical inspection of the surfaces of an object to be tested. The invention is characterized by the fact that it comprises the following components: - at least one light source, - at least one light-distributing surface, - at least one projection stage and - one detector for electromagnetic radiation.