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Fraunhofer-Institut für Produktionsanlagen und Konstruktionstechnik IPK
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PublicationGrazing-incidence interference microscopy for the measurement of topography of fine-machined surfaces( 1993)
;Spur, G. ;Körner, K. ;Nyarsik, L. ;Fritz, H.Uhlmann, E.A possibility for measuring the form, waviness and roughness of fine-machined surfaces by interferometric means is discussed. A variety of fine-machined surfaces shows parameters in the range of microns. So it is necessary to increase the interferometric increment in a two-beam-interferometer with visible light by grazing incidence illumination. This principle was investigated in a new prism interferometer and in a new grazing incidence microscope. Test measurements are represented and discussed.