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Airflow considerations in the design of production facilities in cleanrooms

: Degenhart, E.

Environmental Engineering 5 (1992), Nr.3, S.11-16
ISSN: 0954-5824
Fraunhofer IPA ()
airflow; design; Luftströmung; Planung; Reinraum

Since airborne particles follow the airflow it is essential to design the functional and structural components of a cleanroom with respect to the airflow and to integrate them into the overall system. The aim is to achieve almost complete separation of the airflow zones that are influenced by the product from potential particle sources. Based on findings gained from flow examinations on selected systems and test stands, some general recommendations are presented here to provide design engineers with a basis for the layout of production facilities in cleanrooms.