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acp Partline Integrated data processing of particle measurements

: Naffin, F.; Ernst, C.; Fode, P.

Volltext urn:nbn:de:0011-px-31650 (497 KByte PDF)
MD5 Fingerprint: 97091fbd7e16c2aafde1a6d5b83ff258
Erstellt am: 04.10.1999

Semiconductor FABTECH 8 (1998), S.109-115 : Ill., Lit.
ISSN: 1355-8633
ISSN: 1358-1759
Zeitschriftenaufsatz, Elektronische Publikation
Fraunhofer IPA ()
cleanroom; contamination; data aquisition; data processing; evaluation; measurement; monitoring; particle; process control; quality control; software

Particle contamination has a decisive influence on production success and is therefore an important focal point in the monitoring of "clean" productions. In order to control contamination, data has to be recorded, evaluated in a defined way and be further processed. Modern measurement software can be extremely useful, provided that it integrates the individual process steps and gives the user a flexible evaluation of his raw data adapted to his requirements.The Fraunhofer Institute for Manufacturing Engineering and Automation in Stuttgart has developed an integrated software package which offers a holistic solution, even to complex contamination tests.