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Pulsed laser deposition of x-Ray optical layer stacks with atomically flat interfaces


Abeles, F. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Optical Interference Coatings : 6-10 June 1994, Grenoble, France
Bellingham/Wash.: SPIE, 1994 (SPIE Proceedings Series 2253)
ISBN: 0-8194-1562-6
International Symposium on Optical Interference Coatings <1994, Grenoble>
Fraunhofer IWS ()
AES; characterization; Charakterisierung; interface; multilayer; Multischicht; Röntgenbeugung; SNMS; TEM; x-ray diffraction

Pulsed laser deposition is described as a technique for the synthesis of multilayer showing X-ray optical quality. The state of the art is characterized by results that demonstrate a development of the instrumental basis superior to that of conventional PLD systems. Multilayers of the Ni/C-, Mo/Si- and W/C-types prove the versatility of the method and the output of layer stack characterization by HREM SPM, XD, AES, XPS, ellipsometry and image processing ensures a high quality with regard to stack regularity, layer homogeneity and interface smoothness.