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Modifications of coatings by DC-sputtering with superimposed HPPMS

: Bandorf, R.; Falkenau, S.; Schmidt, V.

Society of Vacuum Coaters -SVC-, Albuquerque/NM:
Society of Vacuum Coaters. Technical Conference Proceedings 1991-2007. CD-ROM
Albuquerque: SVC, 2007
Society of Vacuum Coaters (Annual Technical Conference) <50, 2007, Louisville/KY>
Fraunhofer IST ()

High ionized pulsed magnetron sputtering HPPMS is used to modify the properties of sputtered films. For most coatings a decrease in deposition rate is reported for HPPMS. Since the discharge has to be ignited with every pulse for longer the off-times we used a dc discharge with additional HPPMS pulses superimposed. We will discuss the influence of this configuration on the deposition rate as well as the properties of the prepared films. First results for the investigation of carbon coatings prepared by this new method will be discussed.