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Piezoelectric scanning micromirror with built-in sensors based on thin film aluminum nitride

: Meinel, K.; Stoeckel, C.; Melzer, M.; Zimmermann, S.; Forke, R.; Hiller, K.; Otto, T.


Cararra, Sandro (Ed.) ; Institute of Electrical and Electronics Engineers -IEEE-:
IEEE Sensors 2019. Conference Proceedings : October, 27-30, 2019, Montreal, QC, Canada
Piscataway, NJ: IEEE, 2019
ISBN: 978-1-7281-1634-1
ISBN: 978-1-7281-1635-8
Sensors Conference <18, 2019, Montreal>
Fraunhofer ENAS ()

A micromirror with piezoelectric thin film aluminum nitride (AlN) as transducer material for actuation and detection is presented. Four sensor elements are integrated for closed-loop monitoring of the resonant driven microscanner with an entire footprint of 6 mm 2 . The sensor and actuator elements are monolithically fabricated in 150 mm SOI technology. A large optical scan angle of 78.1° at 3.403 kHz and 10 V actuation voltage is achieved. The sensor signal increases linearly to the deflection. A dynamic angle sensitivity of 48.4 fC/° is reached. Possible applications are consumer electronics, such as LIDAR or medical applications, such as fluorescence microscopy.