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Non-Polar a-plane AlScN(1120) Thin Film Based SAW Resonantors with Significantly Improved Electromechanical Coupling

: Ding, Anli; Driad, Rachid; Lu, Yuan; Feil, Niclas M.; Kirste, Lutz; Christoph, Tim; Ambacher, Oliver; Zukauskaite, Agne


Institute of Electrical and Electronics Engineers -IEEE-; IEEE Ultrasonics, Ferroelectrics, and Frequency Control Society:
IEEE International Ultrasonics Symposium, IUS 2020. Symposium Proceedings : September 7-11, 2020, Las Vegas, NV, USA, Online Event
Piscataway, NJ: IEEE, 2020
ISBN: 978-1-7281-5448-0
ISBN: 978-1-7281-5449-7
4 S.
International Ultrasonics Symposium (IUS) <2020, Online>
Fraunhofer IAF ()
AlN; AlScN; SAW Resonator; electromechanical coupling; a-plane

1 μm thick non-polar a-plane AlScN(1120) thin films were prepared by magnetron sputter epitaxy on r-planeAl2O3(1102) substrates. X-ray diffraction (XRD) measurements confirmed it as a single-phase wurtzite a-plane AlScN(1120).Surface acoustic wave (SAW) resonators with wavelengths λ = {2,2.5, 3, 4, 5, 6, 7, 8, 10} μm were fabricated on a-planeAl0.77Sc0.23N(1120)0), a-plane Al0.68Sc0.32N(1120)0), and c-planeAl0.77Sc0.23N(0001) thin films. Compared to c-plane Al0.77Sc0.23N-based resonators, 1.85 – 10 times higher effective electromechanical coupling k2eff was observed in the whole investigated resonator wavelength range. 50 % higher figure of merit was obtained from a-plane Al0.77Sc0.23N-based highest frequency (1.71 GHz) SAW resonators and as high as 4.1 % coupling was achieved for a-plane Al0.68Sc0.32N-based resonators(1.39 GHz). Moreover, SAW propagation properties of AlScN(1120)/Al2O3(1102)02) and AlScN(0001)/Al2O3(0001) were analyzed using finite element method (FEM) simulations, theresults were compared and they confirmed the experimentally observed trends.