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Development of a 3D-integrated thermocatalytic sensor for combustible gas detection

: Münchenberger, Finja M.; Dreiner, Stefan; Kappert, Holger; Neubieser, Rahel-Manuela; Vogt, Holger


SMSI 2020 - Sensor and Measurement Science International : Proceedings, 22-25 June 2020, Nuremberg, Germany, SMSI 2020 is cancelled due to COVID-19
Wunstorf: AMA Service, 2020
ISBN: 978-3-9819376-2-6
ISBN: 978-3-9819376-3-3
ISBN: 3-9819376-3-5
Conference "Sensor and Measurement Science International" (SMSI) <2020, Nuremberg/cancelled>
Fraunhofer-Gesellschaft FhG
Fraunhofer Internal Programs-Marktorientierte strategische Vorlaufforschung - MAVO; 836931; FluMEMS
MEMS-basierte katalytisch-thermische Sensoren für Gase und Flüssigkeiten
Bundesministerium für Bildung und Forschung BMBF (Deutschland)
Bundesministerium für Bildung und Forschung BMBF (Deutschland)
Bundesministerium für Bildung und Forschung BMBF (Deutschland)
Fraunhofer IMS ()
thermocatalytic sensor; 3D-Integration; atomic layer deposition (ALD); post-CMOS; Pellistors

A process to integrate a thermocatalytic sensor on top of a CMOS circuitry is presented. Therefore, COMSOL Multiphysics® simulations are performed to evaluate a heater with an optimized temperature uniformity and a suspended design of the sensor element to achieve thermal decoupling from the substrate. The steps for fabrication are shortly described using ALD materials and a sacrificial layer. An example for a released heater structure is shown.