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Crystallization of optically thick films of CoxFe 80-xB20

Evolution of optical, magneto-optical, and structural properties
: Sharma, A.; Hoffmann, M.A.; Matthes, P.; Hellwig, O.; Kowol, C.; Schulz, S.E.; Zahn, D.R.T.; Salvan, G.


Physical Review. B 101 (2020), Nr.5, Art. 054438
ISSN: 0163-1829
ISSN: 1098-0121
ISSN: 0556-2805
ISSN: 2469-9950
Fraunhofer ENAS ()

CoFeB alloys are highly relevant materials for spintronic applications. In this work, the crystallization of CoFeB alloys triggered by thermal annealing was investigated by x-ray diffraction techniques and scanning electron microscopy, as well as spectroscopic ellipsometry and magneto-optical Kerr effect spectroscopy for annealing temperatures ranging from 300 to
600∘C. The transformation of ∼100-nm- thick CoxFe 80-xB20 films from amorphous to polycrystalline was revealed by the sharpening of spectral features observed in optical and magneto-optical dielectric functions spectra. The influence of B on the dielectric function was assessed both experimentally and by optical modeling. By analyzing the Drude component of the optical dielectric function, a consistent trend between the charge-carrier scattering time/resistivity and the annealing temperature was observed, in agreement with the electrical investigations by means of the four-point-probe method.