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An interlaboratory study of the reproducibility of on-wafer S-parameter measurements from 140 GHz to 220 GHz

: Clarke, R.; Shang, Xiaobang; Ridler, Nick M.; Lozar, Roger; Probst, Thorsten; Arz, Uwe


Institute of Electrical and Electronics Engineers -IEEE-:
94th ARFTG Microwave Measurement Symposium 2020 : RF to Millimeter-Wave Measurement Techniques for 5G and Beyond, January 26-29, 2020, San Antonio, Texas, USA
Piscataway, NJ: IEEE, 2020
ISBN: 978-1-7281-2055-3
ISBN: 978-1-7281-2056-0
ISBN: 978-1-7281-2057-7
4 S.
Microwave Measurement Symposium <94, 2020, San Antonio/Tex.>
Fraunhofer IAF ()
on-wafer measurement; co-planar waveguide; measurement repeatability; measurement reproducibility; measurement uncertainty

The development, modelling and characterization of millimeter-wave semiconductor devices calls for accurate and reproducible on-wafer measurements. We report on an interlaboratory study involving on-wafer S-parameter measurements in the 140 GHz to 220 GHz band, conducted by three well-established measurement laboratories. The measurements can be used to form typical reproducibility limits for these measurements when conducted in different laboratories using different equipment and calibration methods.