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Hier finden Sie wissenschaftliche Publikationen aus den FraunhoferInstituten. Analytic solutions for calculating the surface inclination of isotropic media and bare substrates by using reflectionbased generalized ellipsometry
 Journal of vacuum science and technology B. Microelectronics and nanometer structures 38 (2020), Nr.3, Art. 034012, 11 S. ISSN: 0734211X ISSN: 10711023 ISSN: 21662746 ISSN: 21662754 

 Englisch 
 Zeitschriftenaufsatz 
 Fraunhofer IOSB () 
Abstract
Using ellipsometry for curvedsurface characterization requires the knowledge of the surfacenormal vector in order to determine materialrelated surface parameters like refractiveindex, layer thickness, or birefringence of the surface material at the incidence point, becausethe recorded signal depends on both the (unknown) surface normal vector n(x) andmaterialrelated surface characteristics. It is convenient in ellipsometry to parametrize thesurface normal vector by the angle of incidence q and the azimuthal rotation angle f . Dependingon the design of the ellipsometer, there may be two angles f1 and f2 necessary,which describe the azimuthal rotation before and after the light is reflected off the sample,respectively. The authors present analytic formulas to determine f1 and f2 for opticallyisotropic samples using generalized ellipsometry. The resulting measurement uncertaintyis lower than that of previously known methods. Furthermore, the authors provide an analyticformula to calculate q from the ellipsometric angles Y and D for bare substrateswith known refractive index N1 = n1−ik1. The formulas have been evaluated with experimentaldata acquired with a conventional and an imaging retroreflectionbased returnpathellipsometer.