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Finite element analysis of SAW propagation characteristics in c-plane (0001) and a-plane (11-20) ALScN thin films

: Feil, Niclas M.; Kurz, Nicolas; Urban, Daniel F.; Altayara, Abdullah; Bjoern, Christian; Ding, Anli; Zukauskaite, Agne; Ambacher, Oliver


Cochran, Sandy (General Co-Chair) ; Institute of Electrical and Electronics Engineers -IEEE-; IEEE Ultrasonics, Ferroelectrics, and Frequency Control Society:
IEEE International Ultrasonics Symposium, IUS 2019 : October 6 - 9, 2019, Glasgow, Scotland
Piscataway, NJ: IEEE, 2019
ISBN: 978-1-7281-4595-2
ISBN: 978-1-7281-4596-9
ISBN: 978-1-7281-4597-6
International Ultrasonics Symposium (IUS) <2019, Glasgow>
Fraunhofer IAF ()
thin film; SAW Resonator; FEM; a-Plane; AlScN

Al1-xScxN (AlScN) is known for its large elasticand piezoelectric constants and thus is a favorable material for applications in novel radio frequency (RF) components.We investigated a-plane AlScN on r-plane Al2O3(AlScN(11-20)/Al2O3(1-102)). The surface acoustic wave (SAW)propagation properties of AlScN(11-20)/Al2O3(1-102) and AlScN(11-20)/Al2O3(1-102) were analyzed using finite element method (FEM) simulations and the results were compared.Rayleigh-type and Sezawa-type wave modes were identified and the acoustic parameters such as phase velocity, electromechanical coupling coefficient, and reflectivity were evaluated. An increased effective coupling of 5.5% was detected for Rayleigh-type waveson AlScN(11-20)/Al2O3(1-102). The Sezawa-type modes show aneven higher coupling up to 6.2 %. Furthermore, we detected increased reflectivity of AlScN(11-20) films compared to c-planeAlScN(0001). Our results reveal the potential of using a-plane AlScN for increasing the electromechanical coupling, which is needed for the upcoming piezo-acoustic filter requirements.