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Low Power High Bandwidth Acceleration Sensor for Industrial Applications

: Forke, R.; Hiller, K.; Hahn, S.; Weidlich, S.; Konietzka, S.; Motl, T.; Praedicow, A.; Otto, T.


Institute of Electrical and Electronics Engineers -IEEE-:
6th IEEE International Symposium on Inertial Sensors & Systems, INERTIAL 2019. Proceedings : Naples, Florida, USA, 1-5 April 2019
Piscataway, NJ: IEEE, 2019
ISBN: 978-1-5386-7828-2
ISBN: 978-1-5386-7827-5
ISBN: 978-1-5386-7829-9
International Symposium on Inertial Sensors and Systems <6, 2019, Naples/Fla.>
Fraunhofer ENAS ()

This paper reports on the improved micromechanical structures and improved integrated electronics to create high bandwidth acceleration sensors with a high signal to noise ratio and very low power electronics. This ambitious aim can be achieved by a very close co-design of MEMS and ASIC. Our two axis micromechanical element is optimized with respect to its seismic mass, which is needed to have an ultra-low noise sensor. Therefore, a large height of the micro mechanical structure is preferred. Another aim is a very high capacitive sensitivity while keeping the base capacitance as small as possible to aim for a small power consumption. Hence, a high aspect ratio technology is essential.