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On-turbine multisensors based on hybrid ceramic manufacturing technology

: Ziesche, Steffen; Goldberg, Adrian; Partsch, Uwe; Kappert, Holger; Kind, Heidrun; Aden, Mirko; Naumann, Falk


IMAPS Additional Conferences (Device Packaging, HiTEC, HiTEN, & CICMT). Online journal (2019), HiTEN, S.107-111
ISSN: 2380-4491
International Conference and Exhibition on High Temperature Electronics Network (HiTEN) <2019, Oxford>
Fraunhofer IMS ()
Fraunhofer IKTS ()
Fraunhofer ILT ()
Fraunhofer IMWS ()
sensor; Turbine; multilayer ceramic; on-turbine sensors; Low Temperature Cofired Ceramics (LTCC); high temperature cofired ceramics (HTCC)

The contribution evaluates the potential of piezoresistive multilayer ceramic sensory solutions using Low or High Temperature Cofired Ceramics (LTCC/HTCC) for on-turbine sensors. Relevant ceramic materials were characterized and evaluated with regard to applicability and reliability under application-like conditions. A multilayer ceramic sensory element was designed including a ceramic embedded pressure sensing membrane, a Pt100 temperature sensor and ceramic integrated wiring. Appropriate sealing methods to implement the ceramic into metal housings as well as electrical connection solutions were worked out, which allow for an operation under the increased temperatures (> 300°C) of the application. A system concept, including sensory element, signal conditioning electronics, mechanical and electrical interfaces is part of the investigation.